Chemraz® G57

Specifically developed to meet the demands of aggressive dry plasma systems, Chemraz® G57 perfluoroelastomer’s unique formulation provides enhanced plasma resistance and minimal contamination, resulting in less downtime and higher wafer processing yields. Recommended primarily for both static and dynamic oxide etch wafer processing applications, Chemraz® G57 remains stable at service temperatures up to 572°F/300°C.

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Producttype

O-rings

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Temperature

600°F (316°C)

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Features and Benefits

  • Excellent plasma resistance in a variety of aggressive chemical environments
  • Minimal particulation
  • Withstands high service temperatures up to 572°F/300°C

Typical Properties

Polymer Type
FFKM
Color
Burgundy
Manufacturing Method
Compression Molded
Hardness (Shore A)
73
Tensile Strength, (psi)
2000
Elongation (%)
200
100% Modulus (psi)
650

Thermal Expansion

CTE (Coefficient of Thermal Expansion), CLTE/°C
0.000336

Compression Set

Compression Set (%) 204°C, 70 hrs, flat plates, -214 orings
15

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