G74P

A translucent beige compound with semi-crystalline perfluoropolymer nano-filler, specially developed to meet the demands of the semiconductor and bio-analytical industries. Compatible with fluorine-based chemistries and universally suitable for both wet and dry semiconductor processes including Lithography, Plasma, PVD, CVD, Etch, Stripping, and Cleaning. Perlast® G74P combines a fully fluorinated polymer backbone, a fully fluorinated nano-filler system (no inorganic fillers), and a highly fluorinated cross-linking process, which results in a perfluoroelastomer with unrivalled purity, chemical resistance, and mechanical properties. Perlast® G74P exhibits extremely low out-gassing properties, making it ideal for use in vacuum applications.

Exceptionally pure – does not contain any inorganic fillers which may cause particulation problems.
Excellent chemical and temperature resistance.
Excellent mechanical properties.
Extremely low out-gassing properties making it ideal for vacuum sealing applications.
High material compliance reduces surface permeation.
Reduced first wafer effect.
Lower cost of ownership.

Dynamic seals – gate valves, door seals, pendulum valves, ISO valves, bonded gates, and lip seals.

Static seals – O-rings, body seals, chamber lid seals, cathode assembly seals, electro-static-chuck seals, and flange fittings.

Wafer-handling products – end effector pads & vacuum suction pads.

Suitable for use in wet and dry semiconductor processes including:

Other materials in this range

Material type

ASTM D1418 / FFKM

Color

Translucent beige

Hardness (Shore A)

Tensile strength

19 MPa

Elongation at break

210 %

100% Modulus

5.8 MPa

Compression Set (%): 70 h @ 200 ˚C (392 ˚F)

Minimum Operating Temperature

-15 ˚C (+5 ˚F)

Maximum Operating Temperature

-275 ˚C (+527 ˚F)

Continuous Use Temperature

+ 240 ˚C (+464 ˚F)